JPS6312152U - - Google Patents
Info
- Publication number
- JPS6312152U JPS6312152U JP10635886U JP10635886U JPS6312152U JP S6312152 U JPS6312152 U JP S6312152U JP 10635886 U JP10635886 U JP 10635886U JP 10635886 U JP10635886 U JP 10635886U JP S6312152 U JPS6312152 U JP S6312152U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- preliminary chamber
- chamber
- leak valve
- pressure detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635886U JPS6312152U (en]) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635886U JPS6312152U (en]) | 1986-07-11 | 1986-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312152U true JPS6312152U (en]) | 1988-01-26 |
Family
ID=30981639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10635886U Pending JPS6312152U (en]) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312152U (en]) |
-
1986
- 1986-07-11 JP JP10635886U patent/JPS6312152U/ja active Pending
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